CMOS BEOL‐embedded z ‐axis accelerometer
نویسندگان
چکیده
منابع مشابه
CMOS BEOL-embedded z-axis accelerometer
ELECT A first reported complementary metal-oxide semiconductor (CMOS)integrated acceleration sensor obtained through isotropic inter-metal dielectric (IMD) etching of a back-end-of-line (BEOL) integrated circuit interconnection stack, without any additional substrate etching steps, is presented. The mechanical device composed of a CMOSprocess 8 μm-thick metal-via-metal stack of 135 μm diameter ...
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ژورنال
عنوان ژورنال: Electronics Letters
سال: 2015
ISSN: 0013-5194,1350-911X
DOI: 10.1049/el.2015.0140